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Publication Title | 1972 1975 Johan K. Fremerey Spinning rotor vacuum gauge 1972 First oil-free piston vacuum pump John L. Farrant 1974

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Text | 1972 1975 Johan K. Fremerey Spinning rotor vacuum gauge 1972 First oil-free piston vacuum pump John L. Farrant 1974 | 001



1972 – 1975

Johan K. Fremerey Spinning rotor vacuum gauge 1972



R. C. Merrill G.J. Egan, B.W. Paszek and A.J. Aronson Roll coater for deposition on plastic film

1972

Structure Zone Model for sputter-deposited films John A. Thornton 1974

Last Apollo Mission The Earth in the vacuum of space – from Apollo-17 (NASA - 1972)

John S. Chapin Planar magnetron sputter deposition source U.S. Patent 4166018 (1979 ) filed 1974

Cryo-pumps for Space Simulation and semiconductor fabrication 1975

Special Report: Vacuum Physics Today August 1972

Low-Pressure Chemical Deposition of Polysilicon

Jerry L. Kruma and Paul G. Hilton

Zenith shuts down Lansdale, PA unit 1975

1972

1975

Vacuum Science & Technology Timeline

Low-Pressure Chemical Vapor Deposition of Silicon Dioxide from Tetraethoxysilane

Dan L. Burt, Richard F. Taraci and John E. Zavion U.S. Patent 3934060 (1976), filed 1973

Altair 8800 Computer 1975

Horuhiko Abe, Japan Plasma etching of semiconductors U.S. Patent 3880684 (1975) filed 1973

Reactive ion etching Steven Yoneo Muto

FerrofluidicTM rotary shaft seal Ferrofluidics Corp.

1974

U.S. Patent 3900597 (1975) filed 1973

U.S. Patent 3971684 (1976) filed 1973

Kalrez ®

perfluorocarbon elastomers

E. I. du Pont de Nemours & Co. c. 1975

Image | 1972 1975 Johan K. Fremerey Spinning rotor vacuum gauge 1972 First oil-free piston vacuum pump John L. Farrant 1974



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